[11a-W934-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [11a-W934-3] Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability

〇Hitomi Watanabe¹, Takuma Suzuki¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Daisuke Yamane¹, Toshifumi Konishi², Katsuyuki Machida¹, Hiroyuki Ito¹, Kazuya Masu¹, Masato Sone¹ (1.Tokyo Tech, 2.NTT AT Corp.)

Keywords:MEMS, Au, SEM