The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[11p-W351-1~14] 6.1 Ferroelectric thin films

Mon. Mar 11, 2019 1:00 PM - 5:00 PM W351 (W351)

Yoshiomi Hiranaga(Tohoku Univ.), Takashi Eshita(Wakayama Univ.), Takanori Kiguchi(東北大)

3:15 PM - 3:30 PM

[11p-W351-9] Epitaxial growth of BiFeO3 films on Si substrates by sputtering method

Naoki Okamoto1, Kyohei Izumi1, Takeshi Yoshimura1, Norifumi Fujimura1 (1.Graduate School of Eng.,Osaka Pref. Univ.)

Keywords:ferroelectrics, BiFeO3, MEMS