9:30 AM - 11:30 AM
[12a-PA3-14] Mechanical milling processing on β-Ga2O3 powder
Keywords:Ga2O3, mechanical milling
β-Ga2O3 powders were processed using a vibrational mechanical milling method. The prepared samples were characterized by X-ray diffraction analysis and Raman spectroscopy. The amount of α-Ga2O3 phase was increased as milling time increase. The processed powder was consisted of α-Ga2O3 at the end of the milling processing.