[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-10] Micro-Bending Test of Gold Micro-Cantilevers and the effect of thickness

〇Kosuke Suzuki¹, Ken Hashigata¹, Keisuke Asano¹, Chun-Yi Chen¹, Takashi Nagoshi², Tso-Fu Mark Chang¹, Daisuke Yamane¹, Toshifumi Konishi^1,3, Katsuyuki Machida¹, Hiroyuki Ito¹, Kazuya Masu¹, Masato Sone¹ (1.Tokyo tech, 2.AIST, 3.NTT AT Corp)

Keywords:MEMS, gold