[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [12a-PB3-9] A Study on SCD Electrodes for Au-Proof-Mass 3-axis MEMS Accelerometer

〇Shota Otobe¹, Ken Atsumi¹, Tatsuya Koga¹, Daisuke Yamane¹, Shin-ichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Katsuyuki Machida¹, Masato Sone¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT)

Keywords:MEMS, Acceleromemter, Multiple SCD