12:15 PM - 12:30 PM
[12a-W641-13] Formation of IGZO Thin Film Transistor at Large Area Substrate with Plasma Enhanced Reactive process
Keywords:IGZO, Sputtering
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Tue. Mar 12, 2019 9:00 AM - 12:45 PM W641 (W641)
Keigo Takeda(Meijo Univ.), Haruka Suzuki(Nagoya Univ.)
12:15 PM - 12:30 PM
Keywords:IGZO, Sputtering