The 66th JSAP Spring Meeting, 2019

Session information

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Tue. Mar 12, 2019 9:00 AM - 12:45 PM W641 (W641)

Keigo Takeda(Meijo Univ.), Haruka Suzuki(Nagoya Univ.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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