[12p-W541-1~12] 15.4 III-V-group nitride crystals

△ [12p-W541-12] UV-B lasers fabricated on relaxed AlGaN layer formed on various AlN templates

〇(B)Shouhei Teramura¹, Yuta Kawase¹, Junya Ikeda¹, Yusuke Sakuragi¹, Shinji Yasue¹, Shunya Tanaka¹, Yuya Ogino¹, Motoaki Iwaya¹, Takeuti Tettsuya¹, Satoshi Kamiyama¹, Sho Iwayama^1,3, Isamu Akasaki^1,2, Hideto Miyake³ (1.Meijo Univ., 2.Akasaki Research Center,Nagoya Univ., 3.Graduate School of Regional Innovation Mie Univ.)

Keywords:nitride, Aluminum gallium nitride, laser

In this study, relaxed n - AlGaN films were formed on various AlN templates and the optical properties were evaluated. We have found that there is no large difference in optical characteristics due to AlN template differences and that the optical properties are improved by making the film thickness of n - AlGaN pressure film.