[9p-PB3-1~28] 12.1 Fabrications and Structure Controls

[9p-PB3-5] Reaction between atomic hydrogen and pentacene molecule in gas phase

〇Akira Heya¹, Masato Niibe², Naoto Matsuo¹ (1.Univ. of Hyogo, 2.LASTI Univ. of Hyogo)

Keywords:graphene, pentacene, atomic hydrogen

AA method for the fabrication of nanographene films using pentacene and H₂ gas was proposed. In this method, deposition precursor is generated on a heated catalyst, and thin film is deposited using a precursor that maintains its structure. To realize large-area deposition of nanocarbon (nanographene) on a quartz substrate, we have tried to control the reaction among pentacene, pentacene decomposed precursor and atomic hydrogen. In this study, the reaction between pentacene molecule and atomic hydrogen in gas phase was investigated. It was found that the chemical reaction of atomic hydrogen with pentacene in gas phase was different from that on surface of pentacene film.