[9p-PB6-1~15] 16.3 Bulk, thin-film and other silicon-based solar cells

[9p-PB6-10] The effects of firing process on electrical properties of SiNx/Si structure (III)

〇Kenya Takami¹, Yuuki Horikawa¹, Hidenobu Mori¹, Haruhiko Yoshida¹ (1.Univ. of Hyogo)

Keywords:solar cell, passivation

There is a possibility that the electric characteristics of the passivation film may deteriorate due to the high temperature process of the fire-through process in the solar cell manufacturing process. In this research, in order to improve the characteristics of the passivation film, as a new firing pattern, a method of applying a low temperature annealing treatment at a constant temperature during the cooling process after the fire-through treatment was studied.