[10p-Z02-1~22] 15.4 III-V-group nitride crystals

[10p-Z02-1] [The 42nd JSAP Paper Award Speech] Promotion of lateral growth of GaN crystals on point seeds by extraction of substrates from melt in the Na-flux method

〇Masayuki Imanishi¹, Kosuke Murakami¹, Takumi Yamada¹, Keisuke Kakinouchi¹, Kousuke Nakamura¹, Tomoko Kitamura¹, Kanako Okumura¹, Masashi Yoshimura^1,2, Yusuke Mori¹ (1.Osaka Univ., 2.ILE, Osaka Univ.)

Keywords:GaN, point seed, Na-flux method

In a previous study, we successfully obtained large-diameter, low-dislocation-density GaN wafer using the Na-flux multi-point seed (MPS) technique. However, the lattice constants of the GaN wafer grown by this technique expanded due to oxygen concentration in pyramidal facets. We here invent a breakthrough technique for the promotion of lateral growth, and succeed in suppressing pyramidal facet growth by residual flux formed after extraction of the MPS-GaN substrate from the Na-Ga melt in a crucible. The surface of the grown wafer was fully composed of the c-plane and showed low oxygen concentration, so expansion of lattice constants could be successfully prevented.