1:45 PM - 2:00 PM
[10p-Z09-6] Quantitative evaluation of N concentration of WN films using atom probe tomography
Keywords:semiconductor, atom probe tomography
Presentation information
Oral presentation
13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials
[10p-Z09-1~20] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials
Thu. Sep 10, 2020 12:30 PM - 6:00 PM Z09
Koichiro Saga(Sony), Nobuya Mori(Osaka Univ.), Takashi Hasunuma(Univ. of Tsukuba)