[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

▼ [10p-Z10-13] Acetone Gas Concentration Identification by A SnO₂ Thin Lines Gas Sensor Using Convolution Neural Network

〇Xuesi Li¹, Xianyin Hu¹, Sho Hashimoto¹, Ang Li¹, Reo Kometani¹, Ichiro Yamada², Makiko Noma², Katsufumi Nakanishi², Yusuke Fukuda², Kazuyuki Sashida², Toshiyuki Takemori², Kenichi Maehara², Katsuya Ikeda², Kenichi Yoshida², Yoshio Mita¹, Shin'ichi Warisawa¹ (1.Univ. of Tokyo, 2.Shindengen Co., Ltd.)

Keywords:semiconductor oxide, nanostructure, gas sensor