[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [10p-Z10-14] A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes

〇(M2)Takashi Ichikawa¹, Ken Atsumi¹, Tatsuya Koga¹, Shin-ichi Iida², Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹, Hiroyuki Ito¹ (1.Tokyo Tech, 2.NTT-AT)

Keywords:MEMS, accelerometer, electrostatic capacitive type

This paper describes a single Au proof-mass 3-axis MEMS accelerometer with pillar-shaped electrodes. We have proposed the novel pillar-shaped electrodes for the high resolution and the uniformed sensitivity. The 3-axis Au proof-mass MEMS accelerometer designed by using pillar-shaped electrodes was fabricated. The experimental results showed that Brownian noise and X,Y,Z sensitivities were obtained to be 135 nG/√Hz, 34, 426, and 794 fF/G, respectively. We confirmed that our proposed device has a potential for micro-G level resolution, compared with performance of conventional devices.