Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10
Kuniyuki Kakushima(Tokyo Tech), Tatsuya Okada(Univ. of the Ryukyus)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
12:30 PM - 1:00 PM
〇Akira Toriumi1, Tomonori Nishimura2 (1.Univ. Tokyo (retired), 2.Univ. Tokyo)
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1:00 PM - 1:15 PM
〇(M2)Kenta Kiya1, Akio Furukawa1 (1.Tokyo University of Science)
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1:15 PM - 1:30 PM
〇Toshifumi Imajo1,4, Kenta Moto3,4, Keisuke Yamamoto2, Takashi Suemasu1, Hiroshi Nakashima3, Kaoru Toko1,4 (1.Univ. of Tsukuba, 2.IGSES, Kyushu Univ., 3.GIC, Kyushu Univ., 4.JSPS Research Fellow)
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1:30 PM - 1:45 PM
〇Nobuaki Tarumi1, Shohei Hayashi1, Naohiko Kawasaki1, Yuji Otsuka1 (1.Toray Research Center)
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1:45 PM - 2:00 PM
〇Shogo Shigemasu1, Hideaki Tanimura1, Hikaru Kawarazaki1, Shinichi Kato1, Yoshihide Nozaki1 (1.SCREEN SPE)
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2:15 PM - 2:30 PM
〇(M1C)Rei Kuriki1, He Wang1, Tomohiro Mihira2, Toshiaki Suzuki1, Takayuki Yoshino1, Masaaki Niwa1, Mitsuya Motohashi1 (1.Tokyo Denki Univ, 2.JEOL)
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2:30 PM - 2:45 PM
〇(D)Nguyen ThiKhanh Hoa1, Yuri Mizukawa1, Hiroaki Hanafusa1, Shohei Hayashi2, Seiichiro Higashi1 (1.Hiroshima Univ., 2.Toray Research Cent.)
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2:45 PM - 3:00 PM
〇Kazuo Tsutsui1, Taihei Matsuhashi1, Takuya Hoshii1, Kuniyuki Kakushima1, Hitoshi Wakabayashi1, Tsutomu Nagayama2, Takahiro Higuchi2, Shinichi Kato3, Hideaki Tanimura3, Takayuki Muro4, Tomohiro Matsushita5, Yoshitada Morikawa6 (1.Tokyo Tech, 2.Nissin Ion Equipment, 3.SCREEN, 4.JASRI, 5.NAIST, 6.Osaka Univ.)
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3:00 PM - 3:15 PM
〇(M1)Longxiang Men1, Ryo Yokogawa1,2, Yoichiro Numasawa1,2, Kazuo Tsutsui3, Kuniyuki Kakushima3, Atsushi Ogura1,2 (1.Meiji University, 2.MREL, 3.Tokyo Tech. Inst.)
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3:15 PM - 3:30 PM
〇Masahiro Mori1, Masashi Akabori1, Masahiko Tomitori1, Takashi Masuda1 (1.JAIST)
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3:45 PM - 4:00 PM
〇Yurina Amamoto1, Akasaka Shunsuke1,2, Kanno Isaku2 (1.ROHM, 2.Kobe Univ.)
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4:00 PM - 4:15 PM
〇(M2)Ryuji Kawakita1, Hiroaki Hanafusa2, Yuri Mizukawa2, Seiichiro Higashi2 (1.AdSM,Hiroshima Univ., 2.AdSE,Hiroshima Univ.)
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4:15 PM - 4:30 PM
〇Xuesi Li1, Xianyin Hu1, Sho Hashimoto1, Ang Li1, Reo Kometani1, Ichiro Yamada2, Makiko Noma2, Katsufumi Nakanishi2, Yusuke Fukuda2, Kazuyuki Sashida2, Toshiyuki Takemori2, Kenichi Maehara2, Katsuya Ikeda2, Kenichi Yoshida2, Yoshio Mita1, Shin'ichi Warisawa1 (1.Univ. of Tokyo, 2.Shindengen Co., Ltd.)
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4:30 PM - 4:45 PM
〇(M2)Takashi Ichikawa1, Ken Atsumi1, Tatsuya Koga1, Shin-ichi Iida2, Noboru Ishihara1, Katsuyuki Machida1, Kazuya Masu1, Hiroyuki Ito1 (1.Tokyo Tech, 2.NTT-AT)
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4:45 PM - 5:00 PM
〇(M1)Akihiro Uchiyama1, Takashi Ichikawa1, Tatsuya Koga1, Shin-ichi Iida2, Noboru Ishihara1, Katsuyuki Machida1, Kazuya Masu1, Hiroyuki Ito1 (1.Tokyo Tech, 2.NTT-AT)
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5:00 PM - 5:15 PM
〇Yoshiyuki Watanabe1, Mutsuto Kato1, Toru Yahagi1, Hiroki Murayama1, Kenichi Yoshida2, Kazuyuki Sashida2, Katsuya Ikeda2, Ryosuke Ikeda2, Toshiyuki Takemori2 (1.Yamagata Res Inst Tech, 2.Shindengen)
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5:15 PM - 5:30 PM
〇Ya Zhang1, Yuri Yoshioka1 (1.TUAT)
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