[10p-Z10-1~17] 13.4 Si系プロセス・Si系薄膜・MEMS・装置技術

▼ [10p-Z10-13] Acetone Gas Concentration Identification by A SnO₂ Thin Lines Gas Sensor Using Convolution Neural Network

〇Xuesi Li¹、Xianyin Hu¹、Sho Hashimoto¹、Ang Li¹、Reo Kometani¹、Ichiro Yamada²、Makiko Noma²、Katsufumi Nakanishi²、Yusuke Fukuda²、Kazuyuki Sashida²、Toshiyuki Takemori²、Kenichi Maehara²、Katsuya Ikeda²、Kenichi Yoshida²、Yoshio Mita¹、Shin'ichi Warisawa¹ (1.Univ. of Tokyo、2.Shindengen Co., Ltd.)

キーワード：semiconductor oxide, nanostructure, gas sensor