3:15 PM - 3:30 PM
[11p-Z03-9] Characteristics of transition metal thermal etching by β-diketon gases
Keywords:atomic layer etching
Presentation information
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
[11p-Z03-3~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Fri. Sep 11, 2020 1:30 PM - 4:15 PM Z03
Kenji Ishikawa(Nagoya Univ.), Makoto Satake(Hitachi)