Tsubasa Miyaki

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 10:00 AM - 11:45 AM A202 (6-202)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[12a-A202-1~7] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

10:00 AM - 10:15 AM

[12a-A202-1] Deformation of PVA roller brushes on a rotating wafer

〇Tsubasa Miyaki¹, Yuki Mizushima¹, Toshiyuki Sanada¹, Satomi Hamada², Akira Fukunaga², Hirokuni Hiyama² (1.Shizuoka Univ., 2.Ebara Corp.)