Tatsuki Koyanagi

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:45 PM - 5:15 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12p-A305-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

3:00 PM - 3:15 PM

[12p-A305-6] Measurement of Temperature Distribution inside Silicon Wafer in Millisecond by Optical Interference Contactless Thermometer

〇Tatsuki Koyanagi¹, Asaki Kameda¹, Yuri Mizukawa¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Graduate School of Advanced Sciences of Matter, Hiroshima Univ.)

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