[12a-A202-1~7] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[12a-A202-6] Product design of silicon wafer for advanced CMOS image sensors-Control of SiO₂/Si interface states by hydrocarbon molecular ion implantation-

〇Ryosuke Okuyama¹, Ayumi Masada¹, Akihiro Suzuki¹, Koji Kobayashi¹, Satoshi Shigematsu¹, Ryo Hirose¹, Takeshi Kadono¹, Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO)

Keywords:hydrogen, interface state