The 67th JSAP Spring Meeting 2020

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Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[12p-A202-1~13] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Thu. Mar 12, 2020 1:15 PM - 4:45 PM A202 (6-202)

Nobuya Mori(Osaka Univ.), Takashi Hasunuma(Univ. of Tsukuba)

1:15 PM - 1:30 PM

[12p-A202-1] Oxidation mechanism of Si nanopillar/nanowire

〇ShuJun YE1, Kikuo YAMABE1, Tetsuo ENDOH1 (1.Tohoku Univ.)

Keywords:Si nanopillar, Si nanowire, Si oxidation