The 67th JSAP Spring Meeting 2020

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Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[12p-D519-1~10] 15.5 Group IV crystals and alloys

Thu. Mar 12, 2020 1:45 PM - 4:15 PM D519 (11-519)

Taizoh Sadoh(Kyushu Univ.)

3:30 PM - 3:45 PM

[12p-D519-8] Influences of thermal annealing after bonding on GOI fabrication

〇Shogo Shibata1, Ryosuke Ishikawa1, Yusuke Hoshi1, Kentaro Sawano1 (1.Adv.Res.Lab.TokyoCityUniv.)

Keywords:Germanium On Insulator, Wafer Bonding