[13p-PA8-1~20] 6.2 Carbon-based thin films

▲ [13p-PA8-6] Single Crystal Diamond MEMS Integrated with Magnetostrictive Material for Magnetic Sensing

〇Meiyong Liao¹, Zilong Zhang¹, Liwen Sang¹, Masataka Imura¹, Satoshi Koizumi¹, Yasuo Koide¹ (1.Nattional Institute for Materials Science)

Keywords:MEMS, diamond, Magnetic sensor

In this work, a magnetic sensor by using SCD MEMS resonator coupling with the ferromagnetic magnetostrictive material (Galfenol, FeGa) was fabricated. The detection principle of the external magnetic field is based on the change of the elastic modulus of the ferromagnetic material during the magnetization process.