[14a-A305-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14a-A305-8] Fabrication of SAW resonators on single-crystal diamonds using Minimal-Fab process III

〇Satoshi Fujii¹, Haruki Toonoe², Yasunori Shiba², Manelli Dario³, Motoi Tokuda³, Takashi Ooe³, Koji Kosaka³, Shiro Hara⁴ (1.NIT, Okinawa Coll., 2.Yokogawa S.S., 3.TCK, 4.AIST)

Keywords:Minimal-fab tool, Diamond, Surface Acoustic Wave

Diamond has unique characteristics, including the highest Young’s modulus and highest thermal conductivity among all the materials that have been used and a wide band gap. For SAW applications, diamond has the highest Young’s modulus, and this yields the highest SAW velocity compared with other typical materials such as quartz, LiNbO₃, and LiTaO₃. Yamanouchi published the first paper on SAW filters using a diamond thin film in 1989 [1]. Numerous research reports to date have showed that the SAW device built on diamond wafer could work in frequency range from 2GHz to 10GHz. We reported fabricated 2 GHz one-port SAW resonators with an IDT/AlN/diamond structure on a single crystal diamond half-inch wafer made by Plasma-CVD as the substrate. In this time, we fabricated 5 GHz diamond SAW device using EB lithograph of Minimal-Fab tool. We also developed RF sputtering machine of Minimal-fab tool for AlN thin film. We will report development status of EB lithography and RF sputtering machines as a minimal fab tool and also the performance of the resonator at the conference.