[15a-D311-1~12] 6.3 Oxide electronics

[15a-D311-6] Preparation and evaluation of perovskite-type calcium tantalate thin films

〇Takahiko Kawaguchi¹, Mayuko Sugita¹, Futa Aoshima¹, Naonori Sakamoto¹, Hisao Suzuki¹, Naoki Wakiya¹ (1.Shizuoka Univ.)

Keywords:PLD, dielectric material, perovskite

We have developed a novel PLD method, “Dynamic Aurora PLD”, which can apply the magnetic field during thin film growth. In this method, ionized sources with high energy are supplied to thin film due to the suppression of ion-electron recombination by applying the magnetic field. In this study, we tried to prepare calcium tantalate thin films by Dynamic Aurora PLD. As a result, epitaxial thin films of a perovskite phase with composition of Ca/Ta ~1 was obtained, which had not been reported in the phase diagram in CaO-Ta₂O₅ system.