The 67th JSAP Spring Meeting 2020

Presentation information

Poster presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-PA5-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PA5 (PA)

9:30 AM - 11:30 AM

[15a-PA5-19] Epitaxial growth of ε-Ga2O3 thin films on β-Ga2O3(-201) substrates by mist CVD method

Yuki Kajita1, Hiroyuki Nishinaka1, Daisuke Tahara1, Yuta Arata1, Masahiro Yoshimoto1 (1.Kyoto Inst. of Tech.)

Keywords:mist CVD method, wide bandgap semiconductor, gallium oxide