[15a-PA5-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-PA5-22] Epitaxial growth of NiO thin films by RF reactive magnetron sputtering for the investigation of defect properties

〇Keisuke Nishimoto¹, Joonam Kim^1,2, Mutsumi Sugiyama^1,2 (1.Tokyo Univ. Sci, 2.RIST)

Keywords:NiO, epitaxial, sputter