[15a-PA5-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-PA5-6] Increase of Carrier density and Mobility of Ga:ZnO Films by Zn incorporation

〇Masaki Yamashita¹, Rei Sugiura¹, Yumika Yamada², Shuhei Funaki^1,2, Yasuji Yamada^1,2 (1.Shimane Univ.1, 2.Shimane Univ.2)

Keywords:ZnO, annealing