[15a-PA5-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-PA5-7] Post-deposition Process for Improving Electrical Properties of Sol-gel Deposited ZnO

〇Koji Abe¹, Yasuhiro Morimoto¹ (1.Nagoya Inst. Tech.)

Keywords:ZnO, sol-gel deposition, transparent conductive layer