The 67th JSAP Spring Meeting 2020

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[15p-D215-1~11] 7.3 Micro/Nano patterning and fabrication

Sun. Mar 15, 2020 1:45 PM - 4:45 PM D215 (11-215)

Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Kawata(Osaka Pref. Univ.)

3:45 PM - 4:00 PM

[15p-D215-8] Investigation of Fluorescent UV-Curable Liquids for Fluorescence Nanoimprint Alignment by Photo-Differential Scanning Calorimetry

Takuma Yoshida1, Shunya Ito1, Masaru Nakagawa1 (1.IMRAM, Tohoku Univ.)

Keywords:UV nanoimprint lithography, photo differential scanning calorimetry, photosensitization

Our group has proposed “fluorescence nanoimprint alignment” using a fluorescent liquid and investigated the principle and the practical use in UV nanoimprint process. One of the problems in this method is that a fluorescent UV-curable liquid is cured by a visible light inducing excitation of fluorescent dye. In this study, we measured the differential heat flow values of fluorescent UV-curable liquids by photo differential scanning calorimetry (photo-DSC) under a visible and UV light exposure. Fluorescent UV-curable liquids suitable for “fluorescence nanoimprint alignment” was investigated from the standpoint of chemical structure of radical photoinitiators.