[15p-D215-1~11] 7.3 Micro/Nano patterning and fabrication

[15p-D215-8] Investigation of Fluorescent UV-Curable Liquids for Fluorescence Nanoimprint Alignment by Photo-Differential Scanning Calorimetry

〇Takuma Yoshida¹, Shunya Ito¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

Keywords:UV nanoimprint lithography, photo differential scanning calorimetry, photosensitization

Our group has proposed “fluorescence nanoimprint alignment” using a fluorescent liquid and investigated the principle and the practical use in UV nanoimprint process. One of the problems in this method is that a fluorescent UV-curable liquid is cured by a visible light inducing excitation of fluorescent dye. In this study, we measured the differential heat flow values of fluorescent UV-curable liquids by photo differential scanning calorimetry (photo-DSC) under a visible and UV light exposure. Fluorescent UV-curable liquids suitable for “fluorescence nanoimprint alignment” was investigated from the standpoint of chemical structure of radical photoinitiators.