Oral presentation

[15p-D215-1~11] 7.3 Micro/Nano patterning and fabrication

Sun. Mar 15, 2020 1:45 PM - 4:45 PM D215 (11-215)

Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Kawata(Osaka Pref. Univ.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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1:45 PM - 2:00 PM

[15p-D215-1] Exposure Characteristics of a Squared Optical Fiber Matrix Stacked with Linear Arrays

〇Toshiyuki Horiuchi¹, Jun Watanabe¹, Jun-ya Iwasaki¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)

2:00 PM - 2:15 PM

[15p-D215-2] Soft X-ray Lithography using Laser Plasma Emission at 3 nm

〇Sho Amano¹ (1.Univ.of Hyogo, LASTI)

2:15 PM - 2:30 PM

[15p-D215-3] Computational Prediction of Lithography DTCO for Ultra-low power AI-Edge Chips

〇Kazuya Kadota¹ (1.Nanosciencelab)

2:30 PM - 2:45 PM

[15p-D215-4] Stochastic simulation of pattern formation for chemically amplified resist in extreme ultraviolet lithography

〇(D)Masanori Koyama¹, Masamitsu Shirai¹, Hiroaki Kawata¹, Yoshihiko Hirai¹, Masaaki Yasuda¹ (1.Osaka Pref. Univ.)

2:45 PM - 3:00 PM

[15p-D215-5] Fabrication of multi-layer fine structures by transfer process using double layer PMMA film

〇Hiroaki Kawata¹, Takenori Yamamoto¹, Shunsuke Yagi¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)

3:15 PM - 3:30 PM

[15p-D215-6] Defects of UV-nanoimprinted Patterns Induced by Sequential Infiltration Synthesis and
Defect Reduction by Adding a Cross-Linking Agent

〇Chiaki Miyajima¹, Shunya Ito¹, Takahiro Nakamura¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

3:30 PM - 3:45 PM

△ [15p-D215-7] Surface flattening of COP substrate by repeat thermal nanoimprint for growth of conductive oxide thin films

〇Tomoaki Oga¹, Atsushi Oshima¹, Naho Kaneko¹, Satoru Kaneko^2,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.KISTEC)

3:45 PM - 4:00 PM

[15p-D215-8] Investigation of Fluorescent UV-Curable Liquids for Fluorescence Nanoimprint Alignment by Photo-Differential Scanning Calorimetry

〇Takuma Yoshida¹, Shunya Ito¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

4:00 PM - 4:15 PM

[15p-D215-9] Fabrication of flexible interposer using printing method

〇Atsuhiro Furuta¹, Kazuki Honjo¹, Jun Taniguchi¹ (1.Tokyo University of Sience)

4:15 PM - 4:30 PM

△ [15p-D215-10] Surface flattening of conductive polymer coated PET film by nanoimprint technique

〇Atsushi Oshima¹, Tomoaki Oga¹, Naho Kaneko¹, Satoru Kaneko^1,2, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.KISTEC)

4:30 PM - 4:45 PM

[15p-D215-11] Single-Pulse Laser Development of Metal-Deposited Imprint Resin Patterns

〇Yusuke Isawa¹, Takahiro Nakamura¹, Shunya Ito¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

Sessions

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication