The 67th JSAP Spring Meeting 2020

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[15p-D215-1~11] 7.3 Micro/Nano patterning and fabrication

Sun. Mar 15, 2020 1:45 PM - 4:45 PM D215 (11-215)

Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Kawata(Osaka Pref. Univ.)