Eiji Kamiyama

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 4:00 PM N203 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[10p-N203-1~9] 15.7 Crystal characterization, impurities and crystal defects

1:30 PM - 1:45 PM

[10p-N203-1] One-dimensional array of interstitial oxygen atoms onto SiO₂/Si interface

〇Eiji Kamiyama^1,2, Koji Sueoka² (1.GlobalWafers Japan Co., Ltd., 2.Okayama Pref. Univ.)