Takumi Yonemura

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 12:00 PM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[11a-N305-1~11] 13.7 Compound and power devices, process technology and characterization

11:00 AM - 11:15 AM

[11a-N305-8] Investigation of process damage on GaN surface by using PL and XPS

〇Takumi Yonemura¹, Yoshihiro Saito¹ (1.Sumitomo Electric)