Masatomo Sumiya

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 12:00 PM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[11a-N305-1~11] 13.7 Compound and power devices, process technology and characterization

11:15 AM - 11:30 AM

[11a-N305-9] Dynamic observation of oxidation on GaN surface by real-time XPS under irradiating oxidation gas

〇Masatomo Sumiya¹, Yasutaka Tsuda², Tetsuya Sakamoto², Masato Sumita³, Liwen Sang¹, Yoshitomo Harada¹, Aki Tominaga², Akitaka Yoshigoe² (1.NIMS, 2.JAEA, 3.KIKEN AIP)

Mon. Sep 13, 2021 9:00 AM - 11:45 AM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[13a-N305-1~10] 13.7 Compound and power devices, process technology and characterization

9:15 AM - 9:30 AM

[13a-N305-2] Fabrication and characterization of GaN-HEMT grown on AlN/SiC templates

〇Masatomo Sumiya¹, Osamu Goto², Liwen Sang¹, Yuki Takahara^1,3, Akira Uedono³, Yasutaka Imanak¹, Taichiro Konno², Fumimasa Horikiri², Kenji Kimura², Hajime Fujikura² (1.NIMS, 2.SCIOCS, 3.Univ. of Tsukuba)

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