Hiroki Kondo

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N102 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-N102-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

4:15 PM - 4:30 PM

[12p-N102-11] Effect of high-density nitrogen radical irradiation on molecular beam epitaxy growth of high In-content InGaN

〇Hiroki Kondo¹, Kiyoshi Kuwahara², Dhasiyan Arun Kumar¹, Masaru Hori¹ (1.Nagoya Univ. Low-temp. Plasma, 2.KATAGIRI Eng.)