Kimihiko Kato

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 9:00 AM - 12:00 PM N304 (Oral)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[13a-N304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

11:00 AM - 11:15 AM

[13a-N304-8] Development of EB lithography technique with negative resist for integrated silicon qubits

〇Kimihiko Kato¹, Yongxun Liu¹, Shigenori Murakami¹, Yukinori Morita¹, Takahiro Mori¹ (1.AIST)