Oral presentation
7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication
Sat. Sep 11, 2021 9:00 AM - 10:15 AM N401 (Oral)
Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
9:00 AM - 9:15 AM
〇Toshiyuki Horiuchi1, Hiroshi Kobayashi1 (1.Tokyo Denki Univ.)
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9:15 AM - 9:30 AM
〇Chen Tang1, Atsushi Sekiguchi2,3, Masaaki Yasuda3, Yoshihiko Hirai3 (1.Shanghai Sinyang Semi. Mater. Co., Ltd, 2.LTJ Co., Ltd, 3.Osaka Pref. Univ.)
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9:30 AM - 9:45 AM
〇(M2)Naho Kaneko1, Yuto Maeda1, Tomoaki Oga1, Tomohiro Hayashi1, Evan Angelo Mondarte1, Satoru Kaneko2,1, Akifumi Matsuda1, Mamoru Yoshimoto1 (1.Tokyo Tech, 2.KISTEC)
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9:45 AM - 10:00 AM
〇Atsuhiro Furuta1, Shin Hiwasa2, Jun Taniguchi1 (1.Tokyo Univ. of sci, 2.Autex Inc.)
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10:00 AM - 10:15 AM
〇Hideki Tanabe1, Hiroaki Kawata1, Masaaki Yasuda1, Yoshihiko Hirai1 (1.Osaka Pref. Univ.)
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