The 82nd JSAP Autumn Meeting 2021

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Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Wenchang Yeh(Shimane Univ.), Taizoh Sadoh(Kyushu Univ.)

4:30 PM - 4:45 PM

[10p-N302-11] Crystallization of InSb Films on Glass by RTA

Takashi Kajiwara1, Otokichi Shimoda2, Tatsuya Okada2, Charith Jayanada Koswaththage2, Takashi Noguchi2, 〇Taizoh Sadoh1 (1.Kyushu Univ., 2.Univ. Ryukyus)

Keywords:semiconductor, InSb

ガラス基板上におけるInSn薄膜の急速熱処理法(RTA)による結晶成長を検討したので報告する。