10:55 AM - 11:10 AM
[11a-S301-6] Surface reactions induced by low-energy ion irradiation in atomic layer processes
Keywords:atomic layer etching
Presentation information
Symposium (Oral)
Symposium » Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control
[11a-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control
Sat. Sep 11, 2021 9:00 AM - 11:40 AM S301 (Oral)
Takeshi Momose(Univ. of Tokyo), Hiroki Kondo(Nagoya Univ.)