[12p-N303-1~11] 13.6 Nanostructures, quantum phenomena, and nano quantum devices

△ [12p-N303-8] Fabrication of 10 THz-band GRIN lens of Si with sub-wavelength structure

〇Chiharu Kashima¹, Taiki Eda¹, Lisa Toyoshima¹, Keito Tsukamoto¹, Kasumi Miyata¹, Yuka Goto¹, Keita Yamamoto^2,3, Yoshinori Shohmitsu², Toshihiro Nakaoka¹, Takehiko Wada² (1.Sophia Univ., 2.ISAS/JAXA, 3.SOKENDAI)

Keywords:optics, terahertz radiation, nanostructure

Optical devices with sub-wavelength structure have been actively studied. Interference filters in the 30 µm wave band with the sub-wavelength structure were proposed for application to infrared astronomy, which is important for understanding the formation and evolution of solid particles in the universe. The filter has the advantage of being robust against cryogenic thermal cycling because it can be composed of a single material, Si, which is the transmitting material in this wavelength range. In this paper, we report on the fabrication of Si GRIN lens with a sub-wavelength structure.