[23a-P05-1~2] 13.3 Insulator technology

[23a-P05-1] Dependence of penetration barrier of alkaline earth metal ions into SiN_x and SiO_x films on ion radius

〇Tomoki Oku¹, Masahiro Totsuka¹, Hajime Sasaki¹ (1.Mitsubishi Electric)

Keywords:moisture resistance, Contamination, passivation film

In order to analyze the effect of ions on the deterioration of the moisture resistance of the protective film, in addition to the alkali metal ions (Li ⁺, Na ⁺, K ⁺, Rb ⁺) on the SiN_x and SiO_x films that have defects so far, alkaline earth metals (Be²⁺ , Mg²⁺, Ca²⁺, Sr²⁺), molecular orbital calculation was applied to find the penetration barrier. When the relationship between the generated energy at the vacancy site and the ionic radius was investigated, it was found that the differences depending on the period were similar.