9:15 AM - 9:30 AM
〇Hideki Sakurai1,2,3, Tetsuo Narita4, Kazufumi Hirukawa2, Kensuke Sumida2, Shinji Yamada1,2,3, Keita Kataoka4, Masahiro Horita1,2, Nouyuki Ikarashi1,2, Michal Bockowski1,5, Jun Suda1,2, Tetsu Kachi1 (1.IMaSS, Nagoya Univ., 2.Nagoya Univ., 3.ULVAC ATI, 4.ToyotaCentralR&DLabs, 5.UNIPRESS)