10:45 AM - 11:00 AM
[18a-Z05-7] Crystallinity and contact resistance of n-type 4H-SiC formed by thin-film laser doping with KrF excimer laser
Keywords:4H-SiC, laser doping, KrF excimer laser
Oral presentation
15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)
Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z05 (Z05)
Hiroaki Hanafusa(Hiroshima Univ.), Hirokuni Asamizu(ローム)
10:45 AM - 11:00 AM
Keywords:4H-SiC, laser doping, KrF excimer laser