[18a-Z16-1~8] 7.3 Micro/Nano patterning and fabrication

△ [18a-Z16-6] Analysis of internal structure of nanometer-scale photo-cured thin films doped with trimethylaluminum

〇Kohei Chiba¹, Takahiro Nakamura¹, Shunya Ito¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

Keywords:photo-cured resin film, sequential vapor infiltration, internal layered structure

We have studied organic-inorganic hybridization of photo-cured thin films by sequential infiltration synthesis. In this report, internal layered structures of photo-cured organic thin films caused by doping with an inorganic precursor of trimethylaluminum were analyzed by X-ray reflectivity measurements and scanning transmission electron microscopy equipped with energy dispersive X-ray spectroscopy. Respective photo-cured films made with a hydroxy-containing bisphenol A-based monomer and a hydroxy-free bisphenol A monomer had internal layered structures with different Al distributions and densities, while a photo-cured film made with their mixture had smaller difference in density than the respective photo-cured films.