[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-3] Plasma diagnostics of carbon-HiPIMS for depositing DLC film (2)

〇Takayuki Ohta¹, Jo Matsushima¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:diamond-like carbon, amorphous carbon, high power impulse magnetron sputtering

In recent years, diamond-like carbon (DLC) film, which is an amorphous carbon including both graphite (sp2 bond) and diamond (sp3 bond) structures, has attracted attention for a hard mask for fabricating 3D NAND memory chip or tribology applications for a coating of the sliding parts of an automobile engine. We have focused on high power impulse magnetron sputtering (HiPIMS). In this study, we measured ion energy distribution function (IEDF) of C+ in HiPIMS with energy-resolved mass spectrometry. The relation between pulse width of power and behaviors of ions was investigated.