The 68th JSAP Spring Meeting 2021

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[18a-Z27-1~9] 15.4 III-V-group nitride crystals

Thu. Mar 18, 2021 9:00 AM - 11:30 AM Z27 (Z27)

Tsutomu Araki(Ritsumeikan Univ.), Atsushi Kobayashi(Univ. of Tokyo)

10:45 AM - 11:00 AM

[18a-Z27-7] Fabrication of AlGaN films by sputtering deposition and face-to-face annealing

〇Shigeyuki Kuboya1, Sho Iwayama2, Kenjiro Uesugi1, Kanako Shojiki3, Kenji Norimatsu1, Hideto Miyake2,3 (1.SPORR, Mie Univ., 2.Grad. Sch. of RIS, Mie Univ., 3.Grad. Sch. of Eng., Mie Univ.)

Keywords:Nitride semiconductor