11:00 AM - 11:15 AM
[18a-Z27-8] Growth of coherent AlN/AlGaN heterostructures and its application to transistors
Keywords:AlGaN, Sputtering
Oral presentation
15 Crystal Engineering » 15.4 III-V-group nitride crystals
Thu. Mar 18, 2021 9:00 AM - 11:30 AM Z27 (Z27)
Tsutomu Araki(Ritsumeikan Univ.), Atsushi Kobayashi(Univ. of Tokyo)
11:00 AM - 11:15 AM
Keywords:AlGaN, Sputtering