Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[20p-A105-1~11] 8.1 Plasma production and diagnostics

Tue. Sep 20, 2022 2:00 PM - 5:00 PM A105 (A105)

Daisuke Ogawa(Chubu Univ.), Kentaro Tomita(Hokkaido Univ.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

+Add all to schedule

2:00 PM - 2:15 PM

△ [20p-A105-1] Development of uniformity diagnostic system to be installed on actual plasma CVD/ALD machines

〇(M2)Takaya Ninomiya¹, Haruhiko Himura¹, Akio Sanpei¹, Miharu Niimoto¹, Shinichiro Inagaki¹ (1.Kyoto Institute of Technology)

2:15 PM - 2:30 PM

△ [20p-A105-2] Passive monitoring of specific particle species in 860 MHz surface wave plasma for plasma CVD/ALD

〇Miharu Niimoto¹, Akio Sanpei¹, Haruhiko Himura¹, Takaya Ninomiya¹, Shinichiro Inagaki¹ (1.KIT)

2:30 PM - 2:45 PM

[20p-A105-3] Measurement of spatial distribution of hydrogen atom above SUS stage in inductively coupled remote H₂ plasma with vacuum ultraviolet absorption spectroscopy

〇(M2)Kazushi Masuda¹, Keigo Takeda¹, Mineo Hiramatsu¹ (1.Meijo Univ.)

2:45 PM - 3:00 PM

△ [20p-A105-4] Monitoring of Material Surface Modification in Plasmas Using a Floating Harmonic Probe Method

〇Junki Morozumi¹, Koji Eriguchi¹, Keiichiro Urabe¹ (1.Kyoto Univ.)

3:00 PM - 3:15 PM

[20p-A105-5] Spatial distribution of RF ring shaped hollow magnetized plasma with two facing cylindrical AZO targets and preparation of AZO thin film

〇Shoma Imoto¹, Yasunori Ohtsu¹ (1.Saga Univ.)

3:15 PM - 3:30 PM

[20p-A105-6] Development of array-shaped RF magnetron sputtering source based on a combination of race-track and segment magnetron plasmas for uniform target utilization

〇(M1)Ryunosuke Masunaga¹, Yasunori Ohtsu¹ (1.Saga Univ.)

3:45 PM - 4:00 PM

[20p-A105-7] Investigation of the reflection spectrum to enhance in-situ measurements of deposited film thickness and electron density with double curling probes

〇(M1)Shota Kato¹, Keiji Nakamura¹, Daisuke Ogawa¹ (1.Chubu Univ.)

4:00 PM - 4:15 PM

[20p-A105-8] Investigation of the possibility to embed curling probe into an electrode

〇(M1)Yuki Kihira¹, Keiji Nakamura¹, Daisuke Ogawa¹ (1.Chubu Univ.)

4:15 PM - 4:30 PM

[20p-A105-9] High density plasma activated by resonance properties of metamaterials and measurements of spatial distribution of plasma parameters

〇(M2)Takuya Mizutomi¹, Yohei Sanami¹, Shigeyuki Miyagi¹, Osamu Sakai¹ (1.Shiga Pref Univ.)

4:30 PM - 4:45 PM

[20p-A105-10] Development of a RF magnetized hollow-cathode discharge source with permanent magnets for high-density hydrogen plasma production

〇Takeshi Uchida¹, Ohtsu Yasunori¹ (1.Saga University)

4:45 PM - 5:00 PM

△ [20p-A105-11] Development research of a compact separator to extract only reactive ions from low-temperature plasma

〇Subaru Nishio¹, Haruhiko Himura¹, Toshikazu Okada¹, Yutaro Nakajima¹, Shinichiro Inagaki¹, Takashi Kanki², Akio Sanpei¹ (1.Kyoto Inst. Tech, 2.JCGA)

Session information

[20p-A105-1~11] 8.1 Plasma production and diagnostics

△ [20p-A105-1] Development of uniformity diagnostic system to be installed on actual plasma CVD/ALD machines

△ [20p-A105-2] Passive monitoring of specific particle species in 860 MHz surface wave plasma for plasma CVD/ALD

[20p-A105-3] Measurement of spatial distribution of hydrogen atom above SUS stage in inductively coupled remote H₂ plasma with vacuum ultraviolet absorption spectroscopy

△ [20p-A105-4] Monitoring of Material Surface Modification in Plasmas Using a Floating Harmonic Probe Method

[20p-A105-5] Spatial distribution of RF ring shaped hollow magnetized plasma with two facing cylindrical AZO targets and preparation of AZO thin film

[20p-A105-6] Development of array-shaped RF magnetron sputtering source based on a combination of race-track and segment magnetron plasmas for uniform target utilization

[20p-A105-7] Investigation of the reflection spectrum to enhance in-situ measurements of deposited film thickness and electron density with double curling probes

[20p-A105-8] Investigation of the possibility to embed curling probe into an electrode

[20p-A105-9] High density plasma activated by resonance properties of metamaterials and measurements of spatial distribution of plasma parameters

[20p-A105-10] Development of a RF magnetized hollow-cathode discharge source with permanent magnets for high-density hydrogen plasma production

△ [20p-A105-11] Development research of a compact separator to extract only reactive ions from low-temperature plasma

Authenticate

Session information

[20p-A105-1~11] 8.1 Plasma production and diagnostics

△ [20p-A105-1] Development of uniformity diagnostic system to be installed on actual plasma CVD/ALD machines

△ [20p-A105-2] Passive monitoring of specific particle species in 860 MHz surface wave plasma for plasma CVD/ALD

[20p-A105-3] Measurement of spatial distribution of hydrogen atom above SUS stage in inductively coupled remote H2 plasma with vacuum ultraviolet absorption spectroscopy

△ [20p-A105-4] Monitoring of Material Surface Modification in Plasmas Using a Floating Harmonic Probe Method

[20p-A105-5] Spatial distribution of RF ring shaped hollow magnetized plasma with two facing cylindrical AZO targets and preparation of AZO thin film

[20p-A105-6] Development of array-shaped RF magnetron sputtering source based on a combination of race-track and segment magnetron plasmas for uniform target utilization

[20p-A105-7] Investigation of the reflection spectrum to enhance in-situ measurements of deposited film thickness and electron density with double curling probes

[20p-A105-8] Investigation of the possibility to embed curling probe into an electrode

[20p-A105-9] High density plasma activated by resonance properties of metamaterials and measurements of spatial distribution of plasma parameters

[20p-A105-10] Development of a RF magnetized hollow-cathode discharge source with permanent magnets for high-density hydrogen plasma production

△ [20p-A105-11] Development research of a compact separator to extract only reactive ions from low-temperature plasma

Authenticate

[20p-A105-3] Measurement of spatial distribution of hydrogen atom above SUS stage in inductively coupled remote H₂ plasma with vacuum ultraviolet absorption spectroscopy