The 83rd JSAP Autumn Meeting 2022

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[20a-C101-1~13] 7.3 Micro/Nano patterning and fabrication

Tue. Sep 20, 2022 9:00 AM - 12:30 PM C101 (C101)

Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.)

9:30 AM - 9:45 AM

[20a-C101-3] Development of flexible transparent electrode by silver line laser patterning

Mai Hayase1, Masato Sumiyoshi1, Makoto Takishita1, Vygantas Mizeikis1, Atsushi Ono1 (1.Shizuoka Univ.)

Keywords:Transparent electrode, Photoreduction, Metal-mesh

The purpose of our research is the development of metal-mesh type flexible transparent electrodes with submicron line width. It is required for the future advance of touch panels to develop next-generation of transparent electrodes with low resistance and flexibility to replace ITO. In this research, silver nitrate mixed polymer was focused and irradiated by laser, and silver lines were fabricated by photoreduction reaction. We will present the details of the dependence of the line width and resistivity of silver lines on the laser irradiation conditions, and the fabrication results of metal-mesh structure.